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EQC

Equipment integration for semiconductor and electronics industry.

Based on our long-lasting experience in the characterization, specification and integration of equipment in the semiconductor and electronics industry, we developed the EQC solution.

Complex systems can be quickly integrated using a simple database configuration with minimal effort. This gives you immediate access to the functions:

  • Storage of process data and their automated sampling (MDE)
  • Recognition of processes, procedures and subprocesses
  • Tracking and tracing (lot, batch, carrier, etc.)
  • Storage of plant conditions including process chambers
  • Connection to PDA systems (automated production data acquisition)
  • Alarms and connection to fault signaling systems
  • Self-population of data

In addition, EQC provides a scripting for equipment-specific sequences, which can be edited and extended by the customer at any time.

Through its innovative event broker concept, EQC is also able to forward information to other applications. A port proxy can also be used to connect physically remote installations.

EQC supports the SEMI standard with features such as dynamic event reporting, tracing / data sampling, control of the system via remote commands and much more.

 

Config user interface

Remote User Interface

config user interface

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